x-ray diffraction,low-angle

The interfacial roughness and periodic structure are investigated through simulation of low angle X-ray diffraction spectra based on the dynamical theory.

用X射线衍射的动力学理论对磁控溅射法制备的Mo／SiO2多层膜低角X射线衍射谱进行拟合，定量分析了膜层的周期结构和界面粗糙度。